- Introduction
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Aims
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Česká verze
Principal investigator:
Ing. Miloš Krbal, Ph.D.
University of Pardubice, Faculty of Chemical Technology, Center of Materials and Nanotechnologies - CEMNAT
Phone Number: 466 037 404
e-mail: milos.krbal@upce.cz
One method of creating 1D nanostructures is to use a template that is coated with secondary materials by ALD and then removed. This approach allows the preparation of 1D nanostructures that cannot be prepared naturally. The project aims to develop hollow 1D nanostructured layers of selected materials deposited by ALD using 1D Te nanostructured templates, offering several advantages over commonly used patterns. Since Te removal is achieved by sublimation at about 300 °C in vacuum, in addition to the well-studied oxides (Al2O3 and TiO2), we will investigate TiAlC and metal coatings (Cu and Ni), which readily oxidize in air at high temperatures. Special attention will be paid to the variability of deposition temperatures, thickness limits and optimization of annealing temperatures for the production of free-standing and Te-free hollow 1D nanostructured layers. Our engineering of hollow 1D nanostructures will become a practical guide applicable to the fabrication of similar nanostructures of various compositions on large areas of any substrate, which can be utilized in many applications.
Keywords: hollow 1D nanostructured layers; 1D Te nanostructured template; atomic layer deposition; alumina; titania; carbide; metals
Aims
The aim of the project is to develop hollow 1 D nanostructured layers of selected materials using 1 D Te nanostructure templates. The relationship between Te deposition conditions determining the shapes of 1 D Te nanostructures, ALD processes parameterization, and subsequent Te removal will be studied.
Česká verze